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Large Scale Superthin Integrated Circuits, Solar Batteries, etc… (Hydrogen Film Transplantation)

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Large Scale Superthin Integrated Circuits, Solar Batteries, etc… (Hydrogen Film Transplantation)

The technology is based on the difference of energy of hydrophilic and hydrophobic flat surface jointing and the method of hydrogen-inducing spalling inside a plate of hard material, preliminary saturated with hydrogen and hydrophilically connected to the substrate. The technology consists of:

  1. Methods of direct (without absorption water layer) hydrophilic jointing of solid components of the initial body and the substrate; methods with the use of physical (pressure and temperature) and chemical agents, being generated in the initial solid body with the help of coagulation of diluted hydrogen that results: (1) in the formation of internal surfaces inside a solid body, limiting vacuum or gaseous hydrogen-filled cavities that lie in the plane of coagulation;(2) in thermal or mechanochemical spalling along the plane of coagulation; and finally (3) in the transfer of fine (up to several microns) or ultra-fine (tens of nanometers) layer of the initial solid body to the substrate; (4) in the formation of multi-layer hetero-structures with random alterations of materials (metals, semi-conductors, dielectrics in any structural modification);(5) other.
  2. Designs and production technologies of devices and structures the above described technologies rely on, involved in a wide variety of industrial and consumer-sector applications.

As compared to the existing methods, capable of similar effects, the above described technology is characterized by high-stability, high potential of combining both materials and their thickness, is applicable to a wide variety of materials and instrumental hetero-structures for microelectromechanics, power integrated electronics, radio-, microwave and optoelectronics, nano-and microelectronics, and above all can be realized with the use of standard industrial equipment.

The technology has several applications, namely: (a) production of multi-level silicon structures on the insulator in order to create (super)large-scale integrated circuits with low energy consumption; (b) production of semi-conducting hetero-structures for laser, light-radiating and photo-converting devices, and also solar cells; (c) production of integrated circuits for power intelligent electronics; (d) production of multi-functional systems on the crystal with the in-built power and communication elements; and (e) other applications of the technology, e.g. biochips, are being developed at the moment.